PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Dielectric material, such as SiO2, SiOx, SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of contact material layer 232a and storage location 204.
http://www.w3.org/ns/prov#wasQuotedFrom
  • freepatentsonline.com