About: http://webisa.webdatacommons.org/58397394

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, a thin metal element oxide layer having excellent barrier properties against interconnection material can be selectively formed with a uniform thickness on a surface of an insulating layer including oxygen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com