About: http://webisa.webdatacommons.org/58472691

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During formation of aluminum interconnect, it is common to form an underlying barrier layer of a material, such as titanium nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com