PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In case where the distance is erroneously set, an object such as a semiconductor device is likely to collide with the probe needles while detecting the level of the tips of the probe needles, damaging the semiconductor wafer (object) and/or the probe card.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com