About: http://webisa.webdatacommons.org/58640404

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, such decaborane ion sources have been found to exhibit particularly short service life as compared to other commercial ion sources used in ion implantation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de