About: http://webisa.webdatacommons.org/58780551

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ConsiderableExperience with nanofabrication using electron-beam lithography systems and in thin film processes such as etching, plating, and atomic layer deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	anl.gov