PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • For example, the sacrificial layer on the nozzle wafer 200 does not have to be an a-Si material, but could be formed from other materials that are compatible with exposed devices on the silicon wafers 100, 200, such as Ti, Cr or other metal layers.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com