About: http://webisa.webdatacommons.org/5902357

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In recent years, microelectromechanical systems (MEMS) have exhibited a favorable growth in the usage thereof for apparatuses such as acceleration sensors and video devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es