About: http://webisa.webdatacommons.org/59104244

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, it is preferable that the sacrificial layer 49 is made of a material such as ZnO, Ge, Ti, or Cu that can be easily dissolved in the etchant or etching gas.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com