About: http://webisa.webdatacommons.org/5914232

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some embodiments, the first precursor such as ammonia (NH3) and the second precursor such as hydrogen fluoride (HF) can be used to interact with the dielectric layer 120.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com