About: http://webisa.webdatacommons.org/59288780

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, tetramethylcyclotetrasilane can be used or the trenches can be filled with ECR oxide or an organic insulating material, such as polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es