About: http://webisa.webdatacommons.org/59296712

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Specifically, the bonding substrate 25 consists of a regular high-quality single crystal silicon substrate (silicon wafer), and in an initial state its thickness is for example approximately 600 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr