About: http://webisa.webdatacommons.org/59453029

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A manufacturing method according to the item 7, wherein the second insulating film is a silicon nitride film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com