About: http://webisa.webdatacommons.org/59464237

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method of depositing a layer according to claim 2, wherein the light source is a low-pressure mercury lamp.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com