About: http://webisa.webdatacommons.org/59625729

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The fill metal layer may be deposited using CVD, PVD, plating, or other suitable process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com