About: http://webisa.webdatacommons.org/59891096

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The embodiment described below is an embodiment in which the sealing step, the intermediate heat treatment (interbaking) and the epitaxial growth step are further improved.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr