About: http://webisa.webdatacommons.org/59925665

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The article to be contacted with the liquid may be of any size and shape such as a silicon semi-conductor wafer and the purposes for contacting the article may vary widely.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com