About: http://webisa.webdatacommons.org/59986940

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a metallic film (not shown) which essentially consists of aluminum is formed and the original forms of gate electrodes to be described later are formed by patterning.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com