About: http://webisa.webdatacommons.org/60007335

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The chemical vapor deposition, etching and other processes used in the formation of integrated circuits on the wafer substrate are carried out in multiple process chambers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com