About: http://webisa.webdatacommons.org/60008045

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The defects that can be detected in such embodiments may include any of the PWQ type defects known in the art such as systematic defects, design defects, OPC problems, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es