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About:
http://webisa.webdatacommons.org/60008045
Property
Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
The defects that can be detected in such embodiments may include any of the PWQ type defects known in the art such as systematic defects, design defects, OPC problems, etc.
http://www.w3.org/ns/prov#wasQuotedFrom
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