About: http://webisa.webdatacommons.org/60048370

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The bump structure according to claim 1, in which said substrate is a semiconductor chip.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr