About: http://webisa.webdatacommons.org/60154007

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention relates to apparatus and processes for growing oxides on silicon wafers, silicon-coated wafers or other semiconductors, as used in the semiconductor industry.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com