About: http://webisa.webdatacommons.org/60263602

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The transfer chamber 130 at the transfer unit 120 is formed as a box with a substantially rectangular section, where an inert gas such as N2 gas or clean air is circulated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com