About: http://webisa.webdatacommons.org/60272135

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the etching process is performed using chemically reactive gases and inert gases and a mixture between these and in particular argon, nitrogen, hydrogen and chlorine.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com