About: http://webisa.webdatacommons.org/60292180

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the substrate 1302, or the irradiated layer or layers on substrate 1302, comprises silicon, SiO2 may be grown via GCIB 1301 using an oxygen-containing gas, such as O2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr