About: http://webisa.webdatacommons.org/60304366

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The boron dopant is introduced into the seed layer 16 (i.e., the superficial Si layer 16) by means of chemical vapor deposition, ion implantation, or other suitable method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es