About: http://webisa.webdatacommons.org/60329069

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first substrate 14 can be made from silicon in one embodiment, while the second substrate 18 can be made from a suitably transparent material, such as glass or plastic.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es