About: http://webisa.webdatacommons.org/60345480

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The impact can be reduced further by using an alternate sputtering gas, such as Kr or Xe.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca