About: http://webisa.webdatacommons.org/60379541

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The films also have a decreased level of undesirably components such as chlorine that become incorporated into the film upon deposition of precursor gases to form the film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com