About: http://webisa.webdatacommons.org/60505571

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The conductive film may be a conductive film made of an element selected from Ta, Ti, W, Mo, Cr and Al, or made mainly of an element selected from the same group (FIG. 8A).
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca