About: http://webisa.webdatacommons.org/60599061

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When sputtering ITO, an ITO target added with Group V element such as phosphorus is used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr