About: http://webisa.webdatacommons.org/6070972

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, there occurs the layer reduction of the isolation insulating film 2 in the pattern process of the control gate 8 and the floating gate 5, especially in the process of etching the gate insulating film 7.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com