PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Specifically, boron ions are introduced by ion implantation into the substrate 1 in the state when the surface of the substrate 1 other than the portion to be formed with the well region 13 is covered with a mask, such as a silicon nitride film or a resist film.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com