| http://www.w3.org/ns/prov#value | - A protection layer 110b of silicon dioxide, silicon nitride, or the like 0.1-0.2 ??m thick is provided on the resistance layer 110d between the wiring electrodes 110c, and in addition, an anti-cavitation layer 110a of tantalum or the like 0.1-0.6 ??m thick is formed thereon to protect the resistance layer 110d from various liquids such as ink.
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