About: http://webisa.webdatacommons.org/60804403

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to the present invention, the foregoing and other advantages are achieved in part by a method comprising CMP Cu a Cu alloy with a slurry containing Al2 O3 and oxalic acid.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com