About: http://webisa.webdatacommons.org/60998575

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A conductive film made of an element selected from Ta, Ti, W, Mo, Cr, and Al or mainly containing any one of the elements is formed, and patterned into a desired shape to obtain a gate electrode 52.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr