About: http://webisa.webdatacommons.org/61009952

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to a third aspect of the present invention, there is a provided a method of manufacturing the semiconductor device according to the first aspect, including first to tenth steps as follows.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com