About: http://webisa.webdatacommons.org/61072498

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a system and method for preparing data for one or more masks to create a desired pattern of circuit elements on a mask with a multiple exposure fabrication technique.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com