About: http://webisa.webdatacommons.org/6112480

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Insulating layer 24 may be formed of dielectric materials such as silicon nitride, silicon carbide, silicon oxynitride, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com