About: http://webisa.webdatacommons.org/61170831

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The coating apparatus according to claim 1, wherein the substrate is a semiconductor wafer, and the substrate holding member is a spin chuck for rotating the semiconductor wafer held thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com