About: http://webisa.webdatacommons.org/61226512

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This process is, however, ineffective to remove impurities, such as carbon, present in the dielectric layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca