About: http://webisa.webdatacommons.org/61514105

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating film 309 is formed of a material such as silicon nitride, silicon dioxide, or tantalum oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com