About: http://webisa.webdatacommons.org/61517868

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the features comprise silicon oxide, the spacers may be formed from a nitride, such as silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com