About: http://webisa.webdatacommons.org/61625650

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is related to an illuminating system and method for illuminating a pattern generator, and more particularly for illuminating a pattern generator in a lithography system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com