About: http://webisa.webdatacommons.org/61677938

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a resist film (not shown) is formed in the upper electrode film 37 and patterned such that the resist film remains unremoved in the region other than the region above the via hole 34 b.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com