About: http://webisa.webdatacommons.org/61683562

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 14 wherein the material is a metal deposited in a chemical vapor deposition process. 17.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com