About: http://webisa.webdatacommons.org/6172642

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, a suitable material for masking material 180 is a dielectric material such as silicon nitride (Si3N4) or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com