About: http://webisa.webdatacommons.org/62014457

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first metal layer 14??? can be deposited, for example, by CVD or other method known and used in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com