About: http://webisa.webdatacommons.org/62037077

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method according to claim 1, the electrode including a pad and a bump, the bump being formed on the pad.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com