About: http://webisa.webdatacommons.org/62043121

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This is because physical vapor deposition methods such as a sputtering method can form a film even at a relatively low temperature, and as a result, an amorphous state can be easily obtained.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com